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本文介绍了Au-SiLMIS的结构以及源的发射特性,利用E×B质量分析器,获得了Au-SiLMIS的质谱图,对实验误差进行了理论分析
In this paper, the structure of Au-SiLMIS and the emission characteristics of the source were introduced. The mass spectra of Au-SiLMIS were obtained by using E × B mass analyzer, and the experimental error was analyzed theoretically