日本电报和电话公司(NTT)日前开发成功了采用电子束蚀刻法的三维微加工技术,加工精度实现了全球最小的线宽(10纳米),并利用此技术加工出了直径60微米的全球最小的地球仪。 NTT准备将这项技术应用于纳米电子元件的制造中。此项技术的关键是将过去的二 Japan’s Telegraph and Telephone Corp. (NTT) has recently developed a three-dimensional micromachining technique using electron beam lithography that achieves the world’s smallest linewidth (10 nanometers) with its machining accuracy and uses it to produce the world’s smallest 60-micrometer diameter Globe. NTT is ready to apply this technology to the manufacture of nanoelectronic components. The key to this technology is to move the past two