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纳米压印需采用压印胶进行图案转移,作为压印技术的关键材料,压印胶的性能直接影响到纳米压印的质量。根据压印技术的工艺特点对压印胶进行了分类,介绍了纳米压印用热压印胶和紫外压印胶的发展研究现状和性能优缺点,分析了目前压印胶存在的主要问题,并指出压印胶的研究主要是提高压印胶的脱模性能、固化速率以及简化工艺,主要列举了含氟硅类压印胶、双表面能压印胶的性能特点,并展望了未来的发展方向。
Nano-imprint requires the use of imprint glue for pattern transfer, as the key material for imprint technology, the performance of imprint glue has a direct impact on the quality of nanoimprint. According to the technical characteristics of imprinting technology, the imprinting glues are classified. The development status and performance advantages and disadvantages of hot stamping and UV imprinting are introduced. The main problems existing in imprinting are analyzed. It is pointed out that the researches on the imprint glue are mainly to improve the releasability, curing rate and simplification of the imprinting glue. The main properties of the imprinting glue include the properties of fluorine-containing silicon imprinting glue and double-surface imprinting glue, Direction of development.