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为了解决用AFM自身压痕软件进行纳米硬度测量时无法直接获得载荷-压深曲线和由于受到扫描陶管扫描范围的限制而进行多点压痕实验范围有限的问题,建立了三维微动工作台和原子力显微镜相结合的纳米压痕硬度测量系统．基于该系统,对单晶薄膜材料进行了单点压痕实验,得出该系统适合进行纳米硬度测量的结论;并对薄膜材料的纳米硬度和弹性模量进行了分析,讨论了尺寸效应对两者的影响．另外,进行了40×40的点阵压痕实验,得到了材料整个压痕面的三维形貌图和三维硬度图．
In order to solve the problem that the load-pressure curve can not be directly obtained when using AFM self-indentation software to measure the nano-hardness and the limited range of multi-point indentation experiment is limited by the scanning scope of the scanning ceramic tube, a three-dimensional micro-motion table Nanoindentation hardness measurement system combined with AFM. Based on this system, single-point indentation experiments were carried out on single-crystal thin film materials, and the conclusion that the system is suitable for the measurement of nano-hardness was obtained. The nano-hardness and elastic modulus of the thin film materials were analyzed. The impact of. In addition, a 40 × 40 lattice indentation experiment was carried out to obtain the three-dimensional topography and the three-dimensional hardness map of the entire indentation surface.