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研究了预处理工艺对SOZ膜结晶质量的影响。用SEM、AES,SIMS及TEM技术分析其原因。结果表明,预处理工艺以1200～1250℃、60～120分为好。
The effect of pretreatment process on the crystallization quality of SOZ film was studied. The reasons were analyzed by SEM, AES, SIMS and TEM. The results show that the pretreatment process at 1200 ~ 1250 ℃, 60 ~ 120 is better.