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本文介绍了磁场辅助PECVD工作原理,磁场对沉积薄膜的影响。通过对PECVD中磁场对带电粒子的约束作用、等离子体能量转换频率分析,建立辅助磁场模型并进行数值计算。在现有辅助磁场基础上改进设计适用于PECVD设备的螺线管磁场系统,得到不同物理条件下磁场分布规律。进而确定螺线管结构参数得到均匀分布的磁场,为辅助PECVD磁场的应用提供了一种方法。
This article describes the magnetic field assisted PECVD working principle, the impact of magnetic fields on the deposited film. Through the confinement of the magnetic field on charged particles in PECVD and the analysis of energy conversion frequency of plasma, the auxiliary magnetic field model is established and numerically calculated. Based on the existing auxiliary magnetic field, the magnetic field system of the solenoid suitable for PECVD equipment is improved and the magnetic field distribution under different physical conditions is obtained. And then determine the solenoid structure parameters are evenly distributed magnetic field, to assist the application of PECVD magnetic field provides a method.