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锗单晶衍射光学元件具有特有的色散和温度特性,在红外光学领域,具有广阔的应用前景。衍射元件必须同时满足光学镜面及相位转变点的要求,采用微圆弧金刚石单点车削是解决这一途径的主要方法之一,但采用微圆弧刀具加工时,要求同时满足粗糙度和相位突变点是加工衍射元件的难点,因此,研究微圆弧金刚石刀具车削锗单晶衍射元件具有重大意义。基于DEFORM 3D切削仿真软件,对金刚石刀具车削锗单晶材料进行了仿真分析,分析了切削参数、刀具参数对锗单晶材料粗糙度的影响,并依据仿真试验结果优选切削参数以及刀具参数进行试验,R0.1mm微圆弧刀具车削单晶材料粗糙度达到4 nm。
Germanium single crystal diffractive optical element with unique dispersion and temperature characteristics, in the field of infrared optics, has broad application prospects. The diffraction element must meet the requirements of the optical mirror and the phase transition point at the same time. Single point turning with micro-arc diamond is one of the main methods to solve this problem. However, when using the micro-arc cutting tool, it is required to meet both the roughness and the phase mutation Point is the difficulty of processing diffraction element, therefore, the study of micro-arc diamond tool turning germanium single crystal diffraction element is of great significance. Based on the DEFORM 3D cutting simulation software, the diamond germanium single crystal material was simulated and analyzed. The influence of cutting parameters and tool parameters on the roughness of germanium single crystal material was analyzed. The cutting parameters and tool parameters were optimized according to the simulation results , R0.1mm micro-arc tool turning single-crystal material roughness of 4 nm.