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为提高超高真空系统的极限真空,在加热烘烤期间用干燥气体冲洗法进行了各种试验。结果表明:冲洗的比不冲洗的极限真空要好;间断冲洗的比连续冲洗的极限真空要好。这对如何提高真空系统的极限真空提供了一定实验依据。
In order to increase the ultimate vacuum of the ultra-high vacuum system, various tests were conducted with the drying gas washing method during the heating baking. The results show that the flushing is better than the non-flushing ultimate vacuum; the intermittent flushing is better than the continuous flushing ultimate vacuum. This provides some experimental evidence on how to improve the ultimate vacuum of the vacuum system.