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采用束流直径与集成电路芯片特征尺度相当的重离子微束进行地面模拟研究是深入研究单粒子效应微观机制的有效手段,可为改善航空微电子器件抗辐射性能提供重要信息。为在原有基础上获得更小尺度的重离子微束,新研制了由不锈钢刀口组装的矩形针孔,其线性尺度小于2μm×2μm。另外,为使重离子微束辐照装置更加完善,对辐照装置进行了改造,内容涉及激光精确定位系统的研制;长工作距离显微镜定位系统的改进;样品平台的改进等。因此,需要重新对装置的重复定位精度及其性能进行在束检验实验。
It is an effective way to study the microscopic mechanism of single-particle effect by using the simulation of ground beam with the beam diameter equal to that of the IC chip. It can provide important information for improving the anti-radiation performance of aeronautic microelectronic devices. In order to obtain smaller scale heavy ion microbeams on the basis of the original, a rectangular pinhole assembled by a stainless steel blade has been newly developed with a linear scale of less than 2 μm × 2 μm. In addition, in order to make the heavy ion beam irradiation device more perfect, the irradiation device has been modified, covering the development of laser precise positioning system; long working distance microscope positioning system improvement; sample platform improvement and so on. Therefore, we need to re-repeat the device positioning accuracy and performance of beam inspection experiments.