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ＧａＡｓ材料抛光机理的研究陈坚邦王云春董国荃（北京有色金属研究总院北京１０００８８）关键词：原子氧ＧａＡｓ抛光机理氧化物１引言ＧａＡｓ材料硬度低、脆性大、缺陷多、易解理、加工困难，在抛光工艺中对单晶材料的缺陷及其完整性非常敏感。目前较多采用化学机械...
Research on Polishing Mechanism of GaAs CHEN Jian-Bang WANG Yun-Chun DONG Guo-Quan (Beijing Nonferrous Metal Research Institute, Beijing 100088, China) Keywords: atomic oxygen GaAs polishing mechanism oxide 1 Introduction GaAs material has low hardness, In the polishing process is very sensitive to the defects and the integrity of the single crystal material. Currently more chemical machinery ...