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自我国第一台双频激光干涉仪于1976年研制成功以来,相继有科研、高等院校和工厂等近十个单位做了进一步研究和改进,并有小批量生产。特别是近年来计算技术的应用,使得国产双频激光干涉仪无论在性能上还是在技术指标上都达到了美国HP公司产品的水平。但仪器还没有得到广泛的应用,特别是在计量测试技术领域方面,没有得到应有的重视,本文就双频激光干涉仪的各种用途和有待解决的几个技术问题等作一简要叙述。
Since our country’s first dual-frequency laser interferometer was successfully developed in 1976, nearly 10 units including scientific research institutions of higher education and factories have been further studied and improved with small-batch production. Especially in recent years the application of computing technology, making the domestic dual-frequency laser interferometer in terms of performance or technical indicators have reached the level of the United States HP products. However, the instrument has not been widely used, especially in the area of metrology technology, which has not got the attention it deserves. This article gives a brief account of the various uses of the dual-frequency laser interferometer and several technical problems to be solved.