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作为应用于第三代同步辐射光源的一种重要X射线元件,复合折射透镜成为近年来X射线光学研究的热点之一。平面抛物形折射透镜是复合折射透镜的重要一种。研究过程中,考虑到X射线衍射仪的特定检测环境及随后加工上的技术要求,优化设计了透镜各个参数,用ZEMAX软件对透镜进行光线追迹,模拟验证了设计结果。单组透镜的几何孔径为250μm,焦距为30 cm。共设计30组透镜,透镜个数从1个变化到30个,相应的抛物形顶点处的曲率半径从1.23μm变化到37μm。在光子能量为8.05 keV条件下,透镜的理论透过率从43.3%变化到33.2%。焦斑直径均在微米量级。采用紫外光刻微加工技术,制作了SU-8光刻胶平面抛物形折射透镜。透镜厚度为224μm。透镜光学性能的测试正在进行中。
As an important X-ray element applied to the third generation of synchrotron radiation source, the compound refractive lens has become one of the hot topics in X-ray optical research in recent years. The plane parabolic refractive lens is an important kind of compound refractive lens. In the process of research, taking into account the specific testing environment of X-ray diffractometer and the subsequent processing requirements, various parameters of the lens were optimized and the lens was ray traced by ZEMAX software. The simulation results verify the design results. A single lens has a geometric aperture of 250 μm and a focal length of 30 cm. A total of 30 sets of lens design, the number of lenses from 1 to 30, the corresponding parabolic vertex radius of curvature from 1.23μm to 37μm. At a photon energy of 8.05 keV, the theoretical transmission of the lens changes from 43.3% to 33.2%. Focal spot diameter in the order of microns. Using UV lithography micro-processing technology, made SU-8 photoresist plane parabolic refractive lens. The lens thickness is 224 μm. Testing of the optical properties of lenses is underway.