以前的光学系统都是以横向成像来提高分辨率的。但是,最近都开始使用焦深深的透镜或者付里叶变换透镜那样两个成像面的,纵向成像的光学系统。基于这种观点,这里采用的特殊成像光学系统是具有纵向成像特点的。 (A)付里叶变换透镜象检查掩模的伤痕等一样,在集成电路技 The previous optical systems all used horizontal imaging to improve resolution. However, recently, both imaging surfaces, longitudinally imaged optical systems, such as focal depth lenses or Fourier transform lenses, have been used. Based on this view, the special imaging optics used here are characterized by longitudinal imaging. (A) The Fourier transform lens is like an inspection of a flaw in a mask or the like, in an integrated circuit technology