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为克服激光干涉位移测量系统中直流漂移等低频扰动影响,采用相位调制方法,将有用信号频带移出低频区.对干涉信号,通过乘法操作将被测位移信息变换到调制频率2.5倍频谐波分量的相位上,并利用锁相环解调位移信息.搭建Simulink仿真模型,验证信号处理方法的可行性.结合仿真结果分析直流分量、交流分量幅值等参数对解调结果的影响.结果表明,采用的信号处理方法理论上克服了调制频率对最大测量速度的限制,仿真系统对临界加速度以内的加速信号有良好的追踪能力.
In order to overcome the influence of low-frequency disturbance such as DC drift in laser interferometric displacement measurement system, the phase modulation method is used to shift the useful signal band out of the low frequency region, and the interference signal is converted to the harmonic frequency component of 2.5 times the modulation frequency by multiplication And phase-locked loop is used to demodulate the displacement information. The Simulink simulation model is established to verify the feasibility of the signal processing method. The simulation results are used to analyze the influence of parameters such as DC component and AC component amplitude on the demodulation results. The signal processing method adopted theoretically overcomes the limitation of the modulation frequency to the maximum measurement speed, and the simulation system has good tracking ability to the acceleration signal within the critical acceleration.