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S680DC/RF半导体参数测试系统的SimulTest并行测试软件可以在一次探针接触中对9个器件进行同步测量,使系统可以在200mm晶片的测试时间内完成对300mm的晶片工艺进行测试。改进的SMU增加数字通信和处理能力。每个测试管脚的电子线路设计通过尽可能减小寄生电容和泄漏电流的影响而提高了
The SimulTest parallel test software of the S680DC / RF semiconductor parametric test system enables the simultaneous measurement of nine devices in a single probe contact, allowing the system to test a 300mm wafer process over a 200mm wafer test time. Improved SMU adds digital communications and processing power. The design of the electronics for each test pin improves by minimizing the effects of parasitic capacitance and leakage current