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介绍了碳气凝胶/聚苯乙烯(CRF/CH)双介质柱状靶的制备方法。使用溶胶-凝胶法和微模具原位成型法制备了直径为820μm的间苯二酚-甲醛(RF)气凝胶微柱,在氮气保护下进行高温碳化后得到直径为730μm、密度为250 mg.cm-3的CRF微柱;采用浸渍提拉法在CRF微柱柱面镀制一层厚度为26μm的CH薄膜,形成CRF/CH双介质结构;采用机械微切割技术制备了长度为1 mm,内径为730μm,壁厚为26μm的CRF/CH双介质柱状靶。实验研究了RF,CRF气凝胶微柱的制备工艺、微观形貌及CRF微柱轴向和径向的密度均匀性,探讨了影响CH薄膜厚度的主要因素,并对CH薄膜的表面形貌和两种材料之间的界面进行了表征。
The preparation method of carbon airgel / polystyrene (CRF / CH) double columnar target is introduced. Resorcinol-formaldehyde (RF) airgel micro-columns with a diameter of 820 μm were prepared by sol-gel method and in-situ micro-mold forming method. After carbonization under nitrogen atmosphere, The CRF microcolumns with a thickness of 1 μm and a thickness of 3 μm were coated with CRF microcolumn with a thickness of 26 μm on a CRF microcolumn surface by immersion and pulling method. mm, an inner diameter of 730 μm, and a wall thickness of 26 μm CRF / CH dual-dielectric columnar target. The preparation process, micro-morphology and axial and radial density uniformity of RF and CRF airgel micro-columns were experimentally studied. The main factors influencing CH film thickness were discussed. The surface morphology of CH films And the interface between the two materials was characterized.