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对比研究硅晶体激光直接刻蚀与水射流辅助激光复合刻蚀表面形貌,发现水射流与激光复合刻蚀能够有效去除重铸层并减少裂纹缺陷。研究了水射流流量对刻蚀微观形貌及刻槽深度的影响,结果表明,适当提高水射流的流速有利于改善刻蚀槽体的质量,同时水射流流速在一定程度上会影响到槽体深度,使槽体深度随着流速的提高出现先降后升的规律。最后对水射流的入射角与槽体截面形状关系进行了初步探讨性研究。
By comparing the surface morphology of laser direct etching and water jet assisted laser etching, it is found that water jet and laser combined etching can effectively remove the recast layer and reduce the crack defects. The effects of water jet flow on the morphology and groove depth of the etching were studied. The results show that properly increasing the water jet velocity can improve the quality of the etching tank. At the same time, the water jet velocity affects the groove Depth, so that the depth of the tank with the flow rate increases first and then increase the law. Finally, the relationship between the incident angle of the water jet and the shape of the cross section of the tank was studied.