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钛酸锶陶瓷是软脆难加工的材料,机械加工容易导致表面产生划痕和破裂。采用主控振荡器的功率放大器(MOPA)脉冲光纤激光控制断裂切割钛酸锶陶瓷基片,通过实验得到了激光控制切割机理。首先用激光扫描去除材料,形成应力槽;随着扫描次数的增加,切槽深度增加;热应力达到该材料的断裂阈值,使裂纹沿应力槽扩展,直至完全断裂。该过程属于自适应裂片,无需后续裂片工艺。此外还发现在激光烧蚀材料过程中出现表面平坦化现象。通过选择合适的工艺参数,可以实现0.3mm厚钛酸锶陶瓷基片的成形切割。
Strontium titanate ceramic is soft and difficult to machine materials, machining easily lead to scratches and cracks on the surface. The main control oscillator power amplifier (MOPA) pulsed fiber laser control fracture cutting strontium titanate ceramic substrate, laser cutting mechanism was experimentally obtained. First, the material is removed by laser scanning to form a stress slot. As the number of times of scanning increases, the depth of the slot increases. The thermal stress reaches the threshold value of the material so that the crack expands along the stress slot until it is completely broken. This process belongs to adaptive lobes, without the need for subsequent lobes. In addition, surface flattening occurred during laser ablation of the material. By selecting the appropriate process parameters, can achieve 0.3mm thick strontium titanate ceramic substrate forming cutting.