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给出基于硅的微机械光开关的设计分析。优化设计了光开关结构 ,提出了一种降低扭臂式结构光开关驱动电压的方法。并根据不同结构 ,给出了静电驱动等方面的分析结果。
The design and analysis of silicon-based micro-mechanical optical switches are given. The optical switch structure is optimized, and a method of reducing the driving voltage of the torsion beam structure optical switch is proposed. According to different structures, the analysis results of static electricity driving and so on are given.