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绝对检验是提高菲佐(Fizeau)型干涉仪参考面面形精度的重要方法。研究了过程中温度、重力和夹持力对绝对检验精度的影响。采用Gram-Schmidt拟合方法对参考面面形的变形量进行了拟合,分析了K9、融石英和微晶材料的参考镜均匀温度变化下的热变形及由于热变形导致的相应泽尼克(Zernike)系数的变化。最后,分析了变形量对应的面形误差,建立了每种材料的热变形模型。结果表明,经过重力、夹持力和温度三者的叠加耦合,温度变化产生的变形量与温度变化量仍呈近似的线性关系。在相同的外界条件下,融石英材料产生的整体变形量最小;而微晶材料产生的热变形量最小。微晶参考面由于热变形产生的面形变化量均方根为0.37 nm/℃。
Absolute testing is an important way to improve the surface accuracy of Fizeau interferometer reference surfaces. The influence of temperature, gravity and holding force on the accuracy of absolute test was studied. The deformation of the reference surface was fitted by Gram-Schmidt fitting method, and the thermal deformation under the uniform temperature change of the reference mirror of K9, fused quartz and microcrystalline materials and the corresponding Zernike Zernike coefficient of change. Finally, the shape error corresponding to the deformation is analyzed, and the thermal deformation model of each material is established. The results show that after the superposition of the three factors of gravity, holding force and temperature, there is a linear relationship between the deformation caused by the temperature change and the temperature variation. Under the same external conditions, the overall amount of deformation caused by the fused silica material is the smallest; and the microcrystalline material produces the least amount of thermal deformation. The root mean square change of the microcrystalline reference surface due to thermal deformation was 0.37 nm / ° C.