1.前言 低表面租糙值磨削(包括精密磨削、超精磨削和镜面磨削)可获得R_α0.16～0.006的表面粗糙度,而且工件形状精度和尺寸精度也比较高。所以大部分高精度和低表面粗糙度值的零件质量,都是通过精密磨削来达到的,经过淬硬的高精度零件更是如此。与手工研磨相比,它的生产效率高,易实现自动测量,加工范围广,可加工内外圆柱面、内外圆锥面、端面 1. Introduction Low Surface Roughness (including precision grinding, super-precision grinding and mirror grinding) can obtain R_α0.16 ~ 0.006 surface roughness, and the workpiece shape accuracy and dimensional accuracy is relatively high. So most of the parts with high precision and low surface roughness qualities are achieved by precision grinding, especially after hardened, high-precision parts. Compared with manual grinding, it has the advantages of high production efficiency, easy automatic measurement, wide processing range, machinable inner and outer cylindrical surfaces, inner and outer conical surfaces, end surfaces