利用射频磁控溅射法成功制备了类金刚石薄膜，研究了溅射功率和基片温度对所沉积的薄膜的性能的影响．对所制备的类金刚石薄膜用拉曼光谱、紫外光谱进行了表征，所沉积的类金刚石碳薄膜是簇状分布的ＳＰ２ 碳键和网状分布的ＳＰ３ 碳键互相随机交织在一起的非晶结构．还研究了非晶碳膜的光学性质和电学性质，探索了制备各种不同光学带隙的非晶碳膜的工艺条件，为该类薄膜的实际应用提供了可靠的实验依据 DLC films were successfully prepared by RF magnetron sputtering. The effects of sputtering power and substrate temperature on the properties of the deposited films were investigated. The prepared diamond-like carbon films were characterized by Raman spectroscopy and UV spectrum. The diamond-like carbon films deposited were clusters of randomly distributed SP2 carbon bonds and reticulately distributed SP3 carbon bonds randomly interlaced with each other . The optical properties and electrical properties of amorphous carbon films were also studied. The technological conditions for preparing amorphous carbon films with different optical bandgaps were explored, which provided a reliable experimental basis for the practical application of such films