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Niobium-doped ZnO transparent conductive films are deposited on glass substrates by radio frequency sputtering at 300℃.The influence of O2/Ar ratio on the structural,electrical and optical properties of the as-deposited films is investigated by X-ray diffraction,Hall measurement and optical transmission spectroscopy.The lowest resistivity of 4.0×10-4Ω·cm is obtained from the film deposited at the O2/Ar ratio of 1/12.The average optical transmittance of the films is over 90%.
Niobium-doped ZnO transparent conductive films are deposited on glass substrates by radio frequency sputtering at 300 ° C. The influence of O2 / Ar ratio on the structural, electrical and optical properties of the as-deposited films is investigated by X-ray diffraction, Hall measurement and optical transmission spectroscopy. The lowest resistivity of 4.0 × 10 -4 Ω · cm was obtained from the film deposited at the O2 / Ar ratio of 1 / 12. The average optical transmittance of the films is over 90%.