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利用同步辐射光电子能谱（ＳＲ－ＸＰＳ）原位研究了经 ３ ｋｅＶ Ｏ２＋溅射的 ＳＵＳ ３０４不锈钢中 Ｆｅ、Ｎｉ、Ｃｒ合金元素与氧离子的化学反应活性差异及三种金属元素间的相互作用规律．经低能氧离子溅射后，不锈钢表面形成了一薄层氧化物膜，元素Ｃｒ和Ｎｉ分别以Ｃｒ２Ｏ３和ＮｉＯ形式存在；铁元素的氧化产物随氧离子溅射量的增加分别以ＦｅＯ、ＦｅＯ和Ｆｅ２Ｏ３。共存、全部生成Ｆｅ２Ｏ３的形式存在．在ＳＵＳ ３０４不锈钢中，铬元素与氧离子的化合能力最强，铁元素次之，镍元素的化合能力较弱．同纯金属与氧离子的化合行为比较发现：三种金属元素合金化后，铁、铬元素与氧离子的化合能力提高，而镍元素的氧化速度降低．氧化过程中铁元素与银元素间存在相互作用，只有当铁元素与氧离子反应生成Ｆｅ２Ｏ３后，镍元素才开始氧化．
The chemical reaction activity of Fe, Ni, Cr alloying elements and oxygen ions in SUS 304 stainless steel sputtered by 3 keV O2 + and the interaction between the three metal elements were investigated by using synchrotron radiation photoelectron spectroscopy (SR-XPS) law. After low-energy oxygen ion sputtering, a thin oxide film was formed on the surface of stainless steel. The elements Cr and Ni were present as Cr2O3 and NiO respectively. The oxidation products of iron with oxygen ion sputtering increased with FeO, FeO and Fe2O3. Coexistence, all forms of Fe2O3 exist. In SUS 304 stainless steel, chromium and oxygen ions are most capable of compounding, followed by iron and nickel. Comparing with pure metal and oxygen ion, we found that the alloying ability of iron, chromium and oxygen ions is improved and the oxidation rate of nickel is decreased when the three metal elements are alloyed. During the oxidation process, there is an interaction between iron and silver. Only when the iron is reacted with oxygen to form Fe2O3, the nickel begins to be oxidized.