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航天阀门产品如活门壳体、阀芯等,其密封面处表面粗糙度的加工精度,对阀门密封性能起着至关重要的作用。采用垂直扫描光学干涉法,根据产品材质和表面形状等特性设置不同的测量参数,获得活门壳体平面形密封面、R形密封面和非金属阀芯密封面表面粗糙度的测量图像及测量结果。经测量不确定度分析,扩展相对不确定度小于10%,满足测量精度的要求,实现了毫米级小尺寸平面和曲面表面粗糙度的高精度非接触测量。
Aerospace valve products such as valve housing, valve core, the sealing surface of the surface roughness of the processing accuracy of the valve sealing performance plays a crucial role. Using vertical scanning optical interferometry, different measurement parameters were set according to the characteristics of product material and surface shape to obtain the measurement images and the measurement results of the surface roughness of the sealing surface of the valve housing, the R seal surface and the non-metal valve core seal surface . After the measurement uncertainty analysis, the relative uncertainty is expanded to less than 10% to meet the requirements of the measurement accuracy, and the high-precision non-contact measurement of millimeter-scale small-size surface and surface roughness is achieved.