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叙述了用双靶直流磁控溅射仪制备Ｙ１－ｘＤｙｘＢａ＿２Ｃｕ＿３Ｏ＿（７－６）（ｘ＝０．０３，０．０５）超导薄膜的工艺。按其工艺制备的薄膜Ｔｅ均大于８８Ｋ，随着ｘ值增加，Ｊ＿ｃ有上升趋势。ＸＲＤ、ＳＥＭ的结果表明镝掺杂膜有很好的ｃ轴取向。讨论了高温超导体钉扎机制。
The process of preparing Y1-xDyxBa_2Cu_3O_ (7-6) (x = 0.03,0.05) superconducting thin films by dual target DC magnetron sputtering is described. Te films prepared according to the process are greater than 88K, with the x value increases, J_c has an upward trend. The results of XRD and SEM show that the dysprosium doped film has good c-axis orientation. The mechanism of high temperature superconductor pinning is discussed.