用微切削加工加速度计监测机械振动ＪａｍｅｓＤｏｓｃｈｅｒ等通过振动监测能够确定机械问题，实施定期检修计划，并对旋转和振荡机器进行故障诊断。在工业上，通常采用压电传感器来进行振动监测。这类传感器具有一些明显的优势，如自备电源，封装形式坚固多样，动态范围... Monitoring Mechanical Vibration Using Micro-machined Accelerometers James Doscher et al., Through vibration monitoring, can identify mechanical problems, implement periodic maintenance schedules, and troubleshoot rotary and oscillating machines. In industry, piezoelectric sensors are often used for vibration monitoring. These sensors have some obvious advantages, such as self-powered, robust and diverse package, dynamic range ...