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This paper investigated characteristics of hybrid surlhce plasmon waveguiding modes in metal- clad Si/Si02 waveguide. Mode characteristics are shown to be highly dependent on structure dimensions and polariza- tion states. By controlling the structure dimensions, a compromise between propagation loss and field confine- ment can be made for the waveguiding modes. Here, the waveguide had been particularly designed to have very low loss, in which power is mainly confined in the high-index Si-core region to propagate. This waveguide showed excellent bending, isolation and coupling properties that is suitable for high-density integrated photonic circuits.