论文部分内容阅读
桑迪亚实验室标准部广泛采用比较法，Ｐ Ｖ法和积累清除法校准标准漏孔。比较法可用于 １０－５到 １０－８大气压·厘米３／秒范围。最大误差为１０％．Ｐ Ｖ法主要用于１０－３到１０－５大气压·厘米３／秒范围的较大漏孔的校准，最大误差为５％。最后，积累清除法主要可用于校准 １０－４到 １０－１０大气压·厘米３／秒范围的漏孔，误差在５％到２０％。本文之目的在于介绍这三种校准方法，包括其误差分析，还评述这些方法并将它们与其它漏孔校准方法相比较。
Sandia’s Laboratory Standards Department extensively uses comparative methods, P V methods, and buildup calibration leaks. The comparison method is available for a range of 10-5 to 10-8 atmospheres cm3 / sec. The maximum error is 10%. The P V method is mainly used for the calibration of large leaks in the range of 10-3 to 10 -5 atm / cm 3 with a maximum error of 5%. Finally, the buildup clearance method is mainly used to calibrate leaks in the range of 10-4 to 10-10 atmospheres cm3 / sec with errors of 5% to 20%. The purpose of this article is to introduce these three calibration methods, including their error analysis, review these methods, and compare them with other leak calibration methods.