利用ICEM软件对简化后的准分子激光器气体流道进行二维截面网格划分。基于realizable k-ε湍流模型和多参考系(MRF)模型,利用FLUENT软件对激光器内部气体流动进行稳态流场仿真,获得了气体流动速度大小和分布。仿真结果表明,气体平均流速与风机转速大小呈线性关系,风机扭矩与风机转速的平方也呈线性关系。采用皮托管实测流速分布并与仿真结果进行对比,它们之间的一致证实了仿真结果的可靠性。 The ICEM software is used to conduct a 2D cross-section meshing of the simplified excimer laser gas flow path. Based on the realizable k-ε turbulence model and the multi-reference system (MRF) model, the steady-state flow field inside the laser was simulated by FLUENT software, and the size and distribution of gas flow velocity were obtained. The simulation results show that the average gas flow rate and the fan speed has a linear relationship, the fan torque and the fan speed is also a linear relationship. The measured velocity distribution of pitot tube was compared with the simulation results. The agreement between them confirmed the reliability of the simulation results.