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文章提出了时间一边界跟踪模型的定义,阐述了用该模型确定抗蚀剂显影后的轮廓分布的方法,并给出了模拟计算结果.
In this paper, the definition of the time-boundary tracking model is proposed. The method of determining the profile distribution after developing the resist is described. The simulation results are also given.