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通过化学腐蚀辅助飞秒激光改性的方法,在普通单模光纤(SMF-28)上加工了一种V槽型全光纤马赫泽德尔干涉仪(MZI)传感器件.该器件具有良好的光谱特性,条纹可见度达到6 dB;此外,还具有优异的折射率和温度传感特性.当外界折射率在1.33~1.45变化时,线性拟合得到其灵敏度高达8 225 nm/RIU,线性度高达0.997;在水中,当温度由25℃变化到60℃时,其温度灵敏度高达1.805 nm/℃.研究表明,该传感器结构紧凑,易于加工制造,并且具有极高的折射率灵敏度,特别适用于溶液折射率检测.“,”A fiber in-line Mach-Zehnder interferometer (MZI) with V-shape micro-cavity fabricated by femtosecond laser micromachining and chemical etching method in SMF-28 is proposed.The MZI has showngood spectral characteristics and the fringe visibility of 6dB is observed.Moreover,it has exhibited excellent refractive index and temperature sensing properties.An extremely high refractive index sensitivity of 8 225 nm/RIU with the linearity of 0.997 in the range of 1.33~1.45 is obtained.At the same time,its temperature sensitivity is as high as 1.805 nm/℃ in water in the range from 25 ℃ to 60 ℃.It has demonstrated that the MZI sensor is especially suitable for the refractive index measurement because of its compact size,easy manufacturing and extra-high refractive index sensitivity.