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Novachip超薄罩面空隙率是保证其是否具有优良性能的重要因素,通过对体积法、真空密度法和蜡封法3种不同的毛体积相对密度测试方法的分析和具体的应用后发现:体积法由于表面纹理构造的存在导致通过体积法测试计算得到的空隙率比其真值要高。蜡封法由于人为操作误差的影响其结果变异性较大。Corelok真空密度法则弥补了其他两种方法的不足。
Novachip ultrathin overlay porosity is an important factor to ensure its excellent performance. Through the analysis of volume density method, vacuum density method and wax seal method, three different gross volumetric relative density test methods and application are found: Volume Due to the existence of surface texture, the void ratio obtained by the volumetric method is higher than the true value. Wax closure method due to human error in the operation of the results of greater variability. The Corelok vacuum density law makes up for the deficiencies of the other two methods.