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设计了一种用于２４８ｎｍＫｒＦ准分子激光投影刻蚀加工的反射式物镜。它不仅因无色差具有与可见光同轴观察对准的特性，还满足了激光微加工对物镜大倍率大工作距离的要求。
A reflective objective lens designed for 248 nm KrF excimer laser projection etching was designed. Not only does it have the characteristic of coaxial alignment with visible light because of no color difference, but also meets the requirement of laser micro-machining on large working distance of large magnification objective lens.