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全固态深紫外激光器在光刻和高分辨光谱仪等领域有重要应用价值,而非线性光学晶体KBBF及棱镜耦合技术的应用实现了直接倍频产生深紫外激光(λ200 nm),为全固态深紫外激光器实用化开辟了新途径.2003年,我们与日本东京大学合作,用该方法产生深紫外177.3 nm激光的输出功率为3.5 m
All-solid-state deep ultraviolet laser has important application value in the fields of lithography and high-resolution spectrometer. The application of non-linear optical crystal KBBF and prism coupling technology enables the direct double frequency generation of deep ultraviolet laser (λ200 nm) Laser practical opening up new avenues.In 2003, we cooperate with the University of Tokyo, Japan, using this method to produce deep UV 177.3 nm laser output power of 3.5 m