论文部分内容阅读
面向微机电系统(MEMS)微装配设计了一种压电式微夹钳,该微夹钳基于柔性铰链设计,结构简单、紧凑,具有对称结构的两级位移放大机构,其驱动采用叠堆型压电陶瓷.重点对该微夹钳的张合缩放特性进行了理论分析,建立了电压与末端张合量输入输出模型.样机实验表明,驱动电压为140V时,该微夹钳具有约1 260μm的最大张合量,微操作实践表明:微夹钳能实现对不同形状尺寸大小从50~1 260μm范围的微小器件夹持操作.
A kind of piezoelectric microgripper is designed for MEMS microassembly. The microgripper is based on a flexible hinge design. The microgripper has a simple and compact structure and a two-stage displacement amplification mechanism with a symmetrical structure. The microgripper is driven by a stack type pressure This paper focuses on the theoretical analysis of the expansion and contraction characteristics of the microgripper and establishes the input and output model of the voltage and the terminal tension.The prototype experiment shows that the microgripper has a maximum tension of about 1 260μm when the driving voltage is 140V The micro-operation practice shows that the micro-clamp can realize the micro-device clamping operation with different shape, size and size from 50 ~ 1 260μm.