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在大气下,采用大气压介质阻挡放电(DBD)等离子体枪在低温下(<350℃),以甲烷为单体,氩气为工作气体,在Ti6Al4V钛合金表面制备一层类金刚石薄膜(DLC),以期改善钛合金表面摩擦学性能。利用激光拉曼(Raman)光谱和X射线光电子能谱(XPS)分析了所制备DLC薄膜的结构;利用扫描电子显微镜(SEM)观察DLC薄膜的表面形貌;利用划痕仪测量了DLC薄膜与基体的结合力;利用球-盘摩擦磨损实验仪对DLC薄膜的耐磨性能进行了研究。结果表明:在本实验工艺条件下沉积的类金刚石薄膜厚度约为1.0μm,薄膜均匀且致密,表面粗糙度Ra为13.23nm。类金刚石薄膜与基体结合力的临界载荷达到31.0N。DLC薄膜具有优良的减摩性,Ti6Al4V表面沉积DLC薄膜后摩擦系数为0.15,较Ti6Al4V基体的摩擦系数0.50明显减小,耐磨性能得到提高。
Under atmospheric pressure, a diamond-like carbon film (DLC) was prepared on the surface of Ti6Al4V titanium alloy by atmospheric pressure dielectric barrier discharge (DBD) plasma gun at low temperature (<350 ℃), methane as monomer and argon as working gas , In order to improve the tribological properties of titanium alloy surface. The structure of the prepared DLC thin film was analyzed by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The surface morphology of the DLC thin film was observed by scanning electron microscopy (SEM) Substrate binding force; the use of ball-disc friction and wear tester for DLC film wear resistance were studied. The results show that the thickness of the diamond-like carbon film deposited under the experimental conditions is about 1.0μm, the film is uniform and dense, and the surface roughness Ra is 13.23nm. The critical load of the bonding force between the diamond-like carbon film and the substrate reaches 31.0N. DLC film has excellent friction reducing property. The friction coefficient of DLC film deposited on Ti6Al4V surface is 0.15, which is obviously lower than that of Ti6Al4V matrix, and the wear resistance can be improved.