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一、概况非球面光学检验,以早期的补偿法到现今用计算机制做全息图,国内外已有不少报导与专著。由于剪切干涉仪有如下优点:对外界干扰不甚灵敏,制作简单,携带方便,操作容易,造价低廉,用白光光源即可检验不同口径的光学系统和未镀膜的各种镜面的抛光表面等,二十多年来亦获得了广泛的应用。本文所谈及的是指用剪切干涉仪直接检验非球面以及非球面的补偿系统。早在1970年,美国国家标准局,J.B.Saun-ders以抛物面理论剪切干涉图形为标准。用棱镜剪切干涉仪目视检验了七块离轴抛物面镜(每块直径203毫米,离轴5°)的质量。
First, the overview Aspheric optical inspection, with the early compensation law to the current computer system to do holograms, there have been many reports and monographs at home and abroad. Because shearing interferometer has the following advantages: less sensitive to the outside world interference, simple production, easy to carry, easy to operate, low cost, with white light source can test different sizes of optical systems and uncoated various mirror polished surface For more than two decades, it has also been widely used. This article refers to the shear interferometer direct inspection of aspheric and aspheric compensation system. As early as 1970, the National Bureau of Standards of the United States, J.B.Saun-ders parabolic theory shear interference graph as the standard. The quality of seven off-axis parabolic mirrors (203 mm diameter each, 5 ° off-axis) was visually inspected with a Prism Shear Interferometer.