选取二氧化钛与二氧化硅作为薄膜材料,借助膜系设计软件优化设计膜系。采用离子源辅助沉积的真空镀膜方法,通过调整镀膜工艺参数,减少膜厚控制误差,在石英基底上成功镀制了符合使用要求的多波段滤光膜。所镀膜层在420～640 nm与近红外920～960 nm波段的平均透射比大于95%,680～880 nm和990～1100 nm波段的平均透射比小于3%,能够承受恶劣的环境测试,完全满足红外夜视摄像机的使用要求。 Select titanium dioxide and silicon dioxide as the film material, with film design software to optimize the design of the film system. A vacuum deposition method using ion source assisted deposition is adopted to adjust the coating process parameters and reduce the control error of the film thickness. The multi-band filter film is successfully plated on the quartz substrate according to the requirements of use. The average transmittance of the coating is more than 95% in the range of 420-640 nm and the near-infrared 920-960 nm, and the average transmittance in the range of 680-880 nm and 990-1100 nm is less than 3%. It can withstand harsh environmental tests and completely Meet the infrared night vision camera use requirements.