Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

来源 :材料科学技术学报 | 被引量 : 0次 | 上传用户:annazky
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The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a s
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