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通过试验对超精密车削压电陶瓷微量进给机构进行了研究。文中分析了压电陶瓷的微位移特性,给出了整个机构的设计方法和性能.试验结果表明,该微量进给机构的分辨率达到0.025μm,频响范围0~200Hz,能够满足超精密车削的需要.
Through experiments, the micro-feeding mechanism of ultra-precision turning piezoelectric ceramics has been studied. The paper analyzes the micro-displacement characteristics of piezoelectric ceramics and gives the design method and performance of the whole mechanism. The experimental results show that the resolution of the micro-feed mechanism reaches 0.025μm, the frequency response range of 0 ~ 200Hz, to meet the needs of ultra-precision turning.