We report on the fabrication and modal property studies of planar waveguide structure in x-cut bismuth borate biaxial crystal formed by He ion implantation with triple energies.The prism coupling method is used to measure the effective refractive indices of this waveguide.We reconstruct the refractive index distribution of this waveguide by the reflectivity calculation method.Our results indicate that a broadened optical barrier is produced by the multiple He ion implantations.The so-called tunneling effect of the non-stationary mode in this type of barrier waveguide is presented by the well-known finite difference beam propagation method.