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间隙光纤光栅(g-FBG)兼具菲索干涉和相移光纤光栅(PSFBG)的特征,仿真研究和分析了g-FBG反射谱中菲索干涉谱型和相移光纤光栅谱型对微间隙和温度的敏感特性,提出了一种同时测量微间隙和温度的方法,并建立了测量模型。搭建g-FBG实验系统,测试了不同间隙下的反射谱,验证了仿真结果,数据分析表明微间隙测量误差小于±5nm;制作g-FBG传感头,实现了位移和温度的同时测量,温度灵敏度为8.3pm/℃,测量精度可达0.1℃。基于g-FBG的微间隙与温度同时测量技术具有精度高、体积小和设计灵活等优点。通过建立微间隙与温度的关联方程,可补偿由于温度变化对间隙测量的影响,实现温度无关的微间隙测量。
G-FBG combines the characteristics of Fizeau interferometry and phase-shift fiber grating (PSFBG), and simulates and analyzes the effects of FESO interference type and phase shift fiber grating patterns on the g-FBG reflection spectrum And temperature sensitivity characteristics, a method of simultaneous measurement of micro-gap and temperature is proposed and a measurement model is established. The g-FBG experimental system was built and the reflection spectra under different gaps were tested. The simulation results were verified. The data analysis showed that the measurement error of micro-gap was less than ± 5nm. The g-FBG sensor head was fabricated to measure the displacement and temperature at the same time. Sensitivity of 8.3pm / ℃, measurement accuracy of up to 0.1 ℃. G-FBG-based micro-gap and temperature measurement technology with high precision, small size and design flexibility and so on. By establishing the correlation equation between the micro-gap and the temperature, the influence of the temperature variation on the gap measurement can be compensated to realize the temperature-independent micro-gap measurement.