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The Pd∕B_4C multilayer is a promising candidate for high reflectance mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd∕B_4C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad wavebands of 9.0–10.0, 8.5–10.5, and 8.0–11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%,respectively.
The Pd / B_4C multilayer is a promising candidate for high reflectance mirrors operating in the 8-12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd / B_4C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad wavebands of 9.0-10.0, 8.5-10.5, and 8.0-11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.