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介绍了一种准分子激光脉冲能量稳定系统。它由能量检测、开关电源和控制器组成。其组成部分均良好屏蔽,组件之间由光纤传递信息,通过均值算法进行脉冲-脉冲的放电电压调节,在闸流管放电的强电磁干扰条件下实现了可靠的闭环控制。该系统实验于一重复频率5 Hz,采用火花预电离的KrF激光器。在气体状态好的情况下,将脉冲能量波动相对标准差由4.71%降低至3.01%;在气体状态较差、放电电压较低的情况下,将脉冲能量波动相对标准差由7.18%降低至3.62%,有效地提高了脉冲能量的稳定性。
An excimer laser pulse energy stabilization system is introduced. It consists of energy detection, switching power supply and controller. Its components are well shielded. The components transmit signals by optical fibers. Pulse-to-pulse discharge voltage is adjusted by means of the averaging algorithm. Reliable closed-loop control is achieved under strong electromagnetic interference in the thyristor discharge. The system experiments at a repetition rate of 5 Hz using a KrF laser pre-ionized. Under the condition of good gas, the relative standard deviation of pulsed energy fluctuation was reduced from 4.71% to 3.01%. Under the condition of poor gas and low discharge voltage, the relative standard deviation of pulse energy fluctuation was reduced from 7.18% to 3.62 %, Effectively improve the stability of the pulse energy.