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采用非平衡磁控溅射与等离子源离子注入(PSII)的混合技术,在1Cr18Ni9Ti不锈钢上制备N/Ti,N/TiN/C/DLC多层膜,研究其结构和微动磨损性能,并与N注入层比较。结果表明,N注入层内形成了CrN和Fe3N等氮化物相;多层膜内形成了TiN,Ti2N和CrN等化合物相。PSII技术能够提高1Cr18Ni9Ti不锈钢的表面硬度,N注入层的硬度约为基体硬度的2.5倍,DLC多层膜的硬度约为基体硬度的4倍。N注入层和DLC多层膜都能够提高1Cr18Ni9Ti的抗微动磨损性,虽然DLC多层膜比N注入层薄,但其抗微动磨损性能更好。
N / Ti and N / TiN / C / DLC multilayers were prepared on 1Cr18Ni9Ti stainless steel by using the mixed technology of unbalanced magnetron sputtering and plasma source ion implantation (PSII). The structure and fretting wear properties were studied. N injection layer comparison. The results show that the formation of nitrides, such as CrN and Fe3N, is formed in the N-implanted layer. Compound phases, such as TiN, Ti2N and CrN, are formed in the multilayer. PSII technology can improve the surface hardness of 1Cr18Ni9Ti stainless steel, N injection layer hardness of about 2.5 times the substrate hardness, DLC multilayer film hardness of about 4 times the substrate hardness. Both N-implanted layer and DLC multilayer films can improve fretting wear resistance of 1Cr18Ni9Ti. Although DLC multilayer films are thinner than N-implanted layers, their anti-fretting wear properties are better.