The Characteristics of the Surface Topography of Excimer Laser Processed Al2O3 Ceramic

来源 :武汉理工大学学报:材料科学英文版 | 被引量 : 0次 | 上传用户:shinetos
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Surface of Al2O3 ceramic was processed by an excimer laser and the characteristics of topography were examined based on the application of thesystem(MEMS). It is indicated that the statistic pararueters of surface topography processed by the excimer laser
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