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根据气密封器件内部气氛含量的测试原理,从0.01cc小腔体气密封器件内部气氛含量测试的取样、校准及夹具等方面分析造成0.01cc小腔体气密封器件内部气氛含量测试结果误差的主要因素,其中夹具的结构设计是造成误差的最大影响因素。随后从缩小测试夹具腔体的密封范围、减少穿刺后的内部气氛向外扩散、提高0.01cc小腔体内部气氛进入设备分析室的浓度等方面对夹具优化设计。最后采取同批次型号的0.01cc小腔体器件进行新旧夹具分组比对分析,从测试数据的离散性、设备的端口气氛浓度数据分析可见,经过优化的夹具能够有效提高0.01cc小腔体气密封器件内部气氛含量测试的准确性。这一改进途径也为提高其它气密封器件内部气氛含量检测的可行性及准确性提供了思路。
According to the test principle of the content of gas inside the hermetically sealed device, the analysis of the sampling, calibration and fixture of the inner atmosphere of 0.01cc hermetically sealed device is the main result of the error of the test result of the internal atmosphere content of hermetically sealed device of 0.01cc Factors, including the structural design of the fixture is the biggest contributor to the error. Then from narrowing the sealing range of the test fixture cavity, reducing the outward diffusion of the punctured internal atmosphere, and increasing the concentration of 0.01cc small chamber internal atmosphere into the equipment analysis chamber, etc., the fixture is optimally designed. Finally take the same batch of models of 0.01cc small cavity device for the old and new fixture grouping analysis, from the dispersion of test data, equipment, port atmosphere concentration data analysis shows that the optimized fixture can effectively improve the 0.01cc small cavity gas The accuracy of the internal atmosphere testing of sealed devices. This method of improvement also provides ideas for improving the feasibility and accuracy of the detection of atmospheric contents in other hermetically sealed devices.