论文部分内容阅读
利用直流磁分离及脉冲阴极双激发源等离子弧薄膜沉积装置制备了含Ti底层和无Ti底层的类金刚石碳薄膜(DLC);采用纳米硬度计、原子力显微镜和X射线光电子能谱仪分析了薄膜的力学性能和结构;采用УСК-1型球-盘滑动摩擦磨损试验机考察了薄膜的摩擦性能.结果表明,同无Ti底层的DLC薄膜相比,含Ti底层的DLC薄膜的硬度和弹性模量较低;含Ti底层的DLC薄膜经真空400℃退火后表面层中存在TiO2,内部存在TiC;而无Ti底层的DLC薄膜经真空500℃退火处理后硬度、弹性模量和表面形貌几乎保持不变;无Ti底层的DLC薄膜经空气中500℃退火后摩擦系数明显降低,这是由于DLC薄膜在空气中热处理时更易发生石墨化所致.
A diamond-like carbon (DLC) film with and without Ti underlayer was prepared by DC magnetic separation and pulsed-cathode dual-excitation plasma arc thin film deposition equipment. The films were characterized by nano-hardness tester, atomic force microscope and X-ray photoelectron spectrometer The mechanical properties and the structure of the films were investigated.The tribological properties of the films were investigated with a УСК-1 ball-plate sliding friction and wear tester.The results show that the hardness and elastic modulus The content of Ti in the surface layer is lower than that in the case of vacuum annealing; the DLC film containing Ti underlayer is annealed at 400 ℃ in vacuum, TiO2 exists in the surface layer and TiC exists in the surface. However, the hardness, elastic modulus and surface morphology of the DLC film without Ti under vacuum after annealing at 500 ℃ Remained unchanged; the DLC film without Ti underlayer after the air at 500 ℃ annealing coefficient of friction decreased significantly, this is due to the DLC film heat treatment in air more prone to graphitization.