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为提高C型压力传感器性能,利用有限元方法,对C型结构传感器加工过程中出现的边缘R角、膜厚不均匀、双面对准偏差进行计算与分析.其结果表明控制工艺偏差是研制高性能传感器的基础.
In order to improve the performance of C-type pressure sensor, finite element method was used to calculate and analyze the edge R angle, uneven film thickness and double-sided alignment error occurred in the process of C-type structure sensor. The results show that control process deviation is the basis for the development of high-performance sensors.